Electrodeposition of serpentine CoCu/Cu multilayered GMR micro-device
Document Type
Conference Proceeding
Publication Date
1-1-2006
Abstract
A serpentine microdevice consisting of Co/Cu multilayers were galvanostatically electrodeposited onto a silicon substrate patterned via UV lithography in a two-step process. SEM was used to investigate the morphology of the deposit and edge effect regions were identified. The magnetoresistance was measured with the current perpendicular to the magnetic field along the long length area and parallel to the magnetic field at the short length area due to the serpentine shape. The influence of line width, bilayer number and a pulse train scheme on the giant magnetoresistive property of patterned thin films were examined. copyright The Electrochemical Society.
Publication Source (Journal or Book title)
ECS Transactions
First Page
379
Last Page
385
Recommended Citation
Li, Y., Fan, R., Moldovan, M., Young, D., Wang, W., & Podlaha, E. (2006). Electrodeposition of serpentine CoCu/Cu multilayered GMR micro-device. ECS Transactions, 2 (6), 379-385. https://doi.org/10.1149/1.2408891