Title

Ligo vibration isolation and alignment platforms: An overview of systems, performance and features of interest for the field of precision positioning and manufacturing

Document Type

Conference Proceeding

Publication Date

9-25-2013

Publication Source (Journal or Book title)

Proceedings - ASPE 2013 Spring Topical Meeting MIT Laboratory for Manufacturing and Productivity Annual Summit: Precision Control for Advanced Manufacturing Systems

First Page

94

Last Page

99

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