Title
Prototype microactuators driven by magnetostrictive thin films
Document Type
Article
Publication Date
7-1-1998
Abstract
Si microcantilevers coated with giant magnetostrictive Sm-Fe or Tb-Fe thin films are fabricated and the deflection of the cantilevers is measured as a function of magnetic field. In the case of a microcantilever with the dimension 3.7 mm (length)×1.0 mm (width)×13 μm (thickness), for example, a very large deflection of 52 μm is achieved at 150 Oe from the first ascending magnetic field, by the coating of a Sm42.7Fe56.9B0.4 thin film with the thickness of 1.2 μm. Total deflection doubles when a magnetic field of the same amplitude (150 Oe) is applied alternately in the length and the width directions. Relatively large deflections are also observed for Tb-Fe thin film based microcantilevers as well as other Sm-Fe based cantilevers. The level of deflection achieved in the present magnetostrictive microcantilevers is considered to be suitable for microdevices applications.
Publication Source (Journal or Book title)
IEEE Transactions on Magnetics
First Page
2042
Last Page
2044
Recommended Citation
Lim, S., Han, S., Kim, H., Choi, Y., Choi, J., & Ahn, C. (1998). Prototype microactuators driven by magnetostrictive thin films. IEEE Transactions on Magnetics, 34 (4 pt 1), 2042-2044. https://doi.org/10.1109/20.706786