Direct characterization of hydrodynamic loading on a microelectromechanical systems microstructure
Hydrodynamic loading greatly affects resonant characteristic of microfabricated structures immersed in a viscous fluid. In this letter, we demonstrate a technique to measure hydrodynamic loading on a MEMS resonator in a broad range of actuation frequency. The extracted hydrodynamic loading is in a good agreement with an analytical solution of an oscillating sphere, and a highly accurate model is developed for the hydrodynamic loading of the resonator. The developed technique can directly characterize the hydrodynamic loading of a microstructure with an arbitrary geometry and will facilitate the optimization of MEMS devices and AFM probes operating in a viscous fluid.
Publication Source (Journal or Book title)
Applied Physics Letters
Mehrnezhad, A., Bashir, R., & Park, K. (2016). Direct characterization of hydrodynamic loading on a microelectromechanical systems microstructure. Applied Physics Letters, 108 (11) https://doi.org/10.1063/1.4944412