Polarization sensitive raman microprobe studies of local crystal quality in laser annealed silicon

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The technique of Raman microprobe spectroscopy has been extended to allow polarization sensitive characterization of local crystal quality with lateral mapping capability. Computer minimization algorithms have been utilized to invert Raman scattering intensity versus incident laser polarization information to local crystal orientation. This microprobe method has been applied to investigate the quality of laser annealed polysilicon over oxide films. During the course of laterally seeded epitaxial regrowth of silicon over the oxide film, it was found that the annealed crystal tends to develop large grains of varied size and orientation. Measurements of the local phonon frequency shift, which monitors strain in the material, show large variations across the structures. It is demonstrated that the strain inferred from phonon frequency shifts must be interpreted in terms of the local crystal orientation. © 1984 SPIE.

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Proceedings of SPIE - The International Society for Optical Engineering

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