Title

Shape control of near-field probes using dynamic meniscus etching

Document Type

Article

Publication Date

4-1-2004

Abstract

Dynamic etching methods for fabricating fibre optic tips are explored and modelled. By vertically translating the fibre during etching by an HF solution under an organic protective layer, a variety of tip shapes were created. The probe taper lengths, cone angles and geometrical probe shapes were measured in order to evaluate the dynamic meniscus etching process. Fibre motion, etching rate, meniscus distortion and etching time were all found to be important variables that can be used to control the final probe shape.

Publication Source (Journal or Book title)

Journal of Microscopy

First Page

27

Last Page

35

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