"Solution delivery for copper CVD using Cu(hfac)<sub>2</sub>reduction" by Andrew Maverick

Faculty Publications

Solution delivery for copper CVD using Cu(hfac)₂reduction

Conference Proceeding

1-1-1998

Maverick, A. (1998). Solution delivery for copper CVD using Cu(hfac)₂reduction. Retrieved from https://repository.lsu.edu/chemistry_pubs/3058

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